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SemDex A32

SemDex A32

Production inspection in a clean room

Optical Inspection and Pattern Recognition

Owing to the high packing densities, the microstructures on wafers are no longer visible to the naked eye.

Optical Inspection and Pattern Recognition

To enable the user to find the appropriate field of interest for inspection of the relevant structures in the first place, sentronics metrology also offers its SemDex wafer-inspection system equipped with a high-resolution camera permitting these structures to be displayed on a screen. The camera image is also suitable for automatic pattern recognition because there always remains a residual lateral uncertainty for subsequent wafers, even after robotic positioning. After identification of the desired field of measurement, the sensors then proceed to measure the appropriate area.

Measuring systems for:

Optical Inspection and Pattern Recognition