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SemDex A32

SemDex A32

Production inspection in a clean room

Thin-film and Coatings with sub-µm accuracy

In order to attain complex structures on semiconductors and to accommodate layered structures of ever-increasing functionality in the smallest possible space, the coatings applied are becoming progressively thinner. 

Thin-film and Coatings with sub-µm accuracy

And these extremely thin layers, generally measuring less than 1 µm, have to be applied homogeneously and in exactly the right thicknesses. Moreover, the high lateral resolution of the StraDex t sensor installed in a SemDex wafer-inspection system also permits applications in very small areas, for example in MEMS production.

Measuring systems for:

Thin Films and Coatings